Piezo-resistive transistor based resonator with anti-ferroelectric gate dielectric

ABSTRACT

Describe is a resonator that uses anti-ferroelectric (AFE) materials in the gate of a transistor as a dielectric. The use of AFE increases the strain/stress generated in the gate of the FinFET. Along with the usual capacitive drive, which is boosted with the increased polarization, additional current drive is also achieved from the piezoelectric response generated to due to AFE material. In some embodiments, the acoustic mode of the resonator is isolated using phononic gratings all around the resonator using the metal line above and vias&#39; to body and dummy fins on the side. As such, a Bragg reflector is formed above or below the AFE based transistor. Increased drive signal from the AFE results in larger output signal and larger bandwidth.

CLAIM OF PRIORITY

This application is a divisional of, and claims the benefit of priority to, U.S. patent application Ser. No. 16/238,419 filed on Jan. 2, 2019 and titled “PIEZO-RESISTIVE TRANSISTOR BASED RESONATOR WITH ANTI-FERROELECTRIC GATE DIELECTRIC,” which is incorporated by reference in its entirety.

BACKGROUND

An oscillator may include an electric circuit that produces a periodically varying output at a controlled frequency. Filters may be implemented in circuits that selectively pass certain elements of a signal while eliminating other elements of the signal. A resonator may include circuitry that exhibits resonant behavior (e.g., naturally oscillates at resonant frequencies with greater amplitude than at other non-resonant frequencies). Oscillators, filters, resonators and the like may use quartz crystal, inductors, and/or capacitors to generate or promote certain signal frequencies. Clocking circuits and communication circuits in current Complementary Metal Oxide Semiconductor (CMOS) chips rely on using LC (inductor-capacitor) voltage controlled oscillators in phased lock loops (PLLs) with an external crystal oscillator signal. Use of inductors creates challenges in scaling the circuits down. Inductors also cause cross-coupling between different circuits and they have poor yield. Inductor-less oscillator circuits are needed to integrate multiple frequencies on CMOS chips and scale the size of the chips further. On the other hand, an on-chip high performance oscillator can also get rid of external clock references, which makes the packaging of mobile systems challenging and needs extra signal power.

Conventional oscillators, filters, resonators and the like may use quartz crystal, inductors, and/or capacitors to generate or promote certain signal frequencies. Such components can be expensive, unstable, and/or have too large of a footprint (making them less suitable for inclusion on, for example, a “system on a chip” (SoC) that may include logic circuits as well). These shortcomings are becoming more critical considering the need for oscillators, filters, and resonators is increasing. For example, the number of frequency bands in a wireless system is growing, and consequently so is the number of required filters. Conventional resonators, such as film bulk acoustic resonators (FBAR), are not integrated with major components of wireless systems, such as complementary metal-oxide-semiconductor (CMOS) radio frequency (RF) transceiver circuits. Due to this non-integration, the circuits require special packaging, which is costly in terms of real estate and finances.

The background description provided herein is for the purpose of generally presenting the context of the disclosure. Unless otherwise indicated herein, the materials described in this section are not prior art to the claims in this application and are not admitted to be prior art by inclusion in this section.

BRIEF DESCRIPTION OF THE DRAWINGS

The embodiments of the disclosure will be understood more fully from the detailed description given below and from the accompanying drawings of various embodiments of the disclosure, which, however, should not be taken to limit the disclosure to the specific embodiments, but are for explanation and understanding only.

FIG. 1A illustrates a tri-gate transistor with anti-ferroelectric (AFE) material in the gate of the transistor, in accordance with some embodiments of the disclosure.

FIG. 1B illustrates a cross-section of the tri-gate transistor with AFE material in the gate of the transistor, in accordance with some embodiments of the disclosure.

FIG. 2 illustrates a series of tri-gate transistors that collectively form a resonator, in accordance with some embodiments of the disclosure.

FIG. 3 illustrates a parallel plate capacitor model for modeling resonator actuation, in accordance with some embodiments.

FIG. 4 illustrates capacitive actuation, in accordance with some embodiments.

FIG. 5 illustrates a mechanical resonance within a gate of a multiple tri-gate resonator, in accordance with some embodiments.

FIG. 6 illustrates piezo-resistive sensing in a piezo-resistive resonator (PZR), in accordance with some embodiments.

FIG. 7A illustrates a one dimensional (1D) model of a resonator where the fins are assumed to be tall and actuated when supply V_(DD) is supplied to the source and drain components during gate dielectric actuation, in accordance with some embodiments.

FIG. 7B illustrates a plot showing actuation induced stress distribution in the gate of the transistor.

FIG. 7C illustrates a plot showing a relative change of resistance in three modes of operation, in accordance with some embodiments.

FIG. 8A illustrates a biasing scheme where dielectric actuation is skipped at every other fin while one half of the fines are used for sensing, in accordance with some embodiments.

FIG. 8B illustrates a plot showing stress distribution and frequency sweeps for schemes of FIG. 7A and FIG. 8A, in accordance with some embodiments.

FIG. 8C illustrates a plot showing twice the change of resistance peaks as compared to the higher frequency associated with operation mode of FIG. 7A, in accordance with some embodiments.

FIG. 8D illustrates another biasing scheme where dielectric actuation is skipped at every other fin while one half of the fines are used for sensing, in accordance with some embodiments.

FIG. 9A illustrates a plot showing polarization versus electric field hysteresis loop for an AFE material.

FIG. 9B illustrates a plot showing current voltage relationship in transistor including AFE gate dielectric.

FIGS. 10A-G illustrates acoustic waveguides, respectively, with Bragg reflectors adjacent to a multi-gate transistor having AFE material, in accordance with some embodiments.

FIGS. 11A-B illustrate plots, respectively, showing formation of acoustic phononic crystals above the multi-gate transistor having AFE material, in accordance with some embodiments.

FIG. 12 illustrates a plurality of differential drivers and sensors to provide driving and sensing modes through an array of resonators formed using Bragg reflectors adjacent to a multi-gate transistor having AFE material, in accordance with some embodiments.

FIG. 13 illustrates a flowchart of a method for forming an acoustic waveguide with Bragg reflectors adjacent to a multi-gate transistor having AFE material, in accordance with some embodiments.

FIG. 14 illustrates a smart device or a computer system or a SoC (System-on-Chip) with an acoustic waveguide with Bragg reflectors adjacent to a multi-gate transistor having AFE material, according to some embodiments of the disclosure.

DETAILED DESCRIPTION

Some embodiments use anti-ferroelectric (AFE) materials in the gate of a transistor as a dielectric, which is connected to other transistors for its use as a resonator. The transistors can be a planar Field Effect Transistor (FET) or a non-planar transistor or a combination of both. Nonplanar transistors include FinFET transistors such as double-gate transistors and tri-gate transistors, and wrap-around or all-around gate transistors such as nanoribbon and nanowire transistors. Other transistors within the scope of various embodiments include Tunneling FET (TFET), Square Wire, or Rectangular Ribbon Transistors, ferroelectric FET (FeFETs), or other devices implementing transistor functionality like carbon nanotubes or spintronic devices. Metal Oxide Semiconductor (MOSFET) have symmetrical source and drain terminals i.e., are identical terminals and are interchangeably used here. A TFET device, on the other hand, has asymmetric Source and Drain terminals. Those skilled in the art will appreciate that other transistors, for example, Bi-polar junction transistors (BJT PNP/NPN), BiCMOS, CMOS, etc., may be used without departing from the scope of the disclosure.

In some embodiments, an apparatus (e.g., a resonator) comprises: a first nonplanar transistor (e.g., FinFET1) including a first fin that includes first source and drain regions, and a first channel between the first source and drain regions. In some embodiments, the resonator comprises a second nonplanar transistor including a second fin that includes second source and drain regions, and a second channel between the second source and drain regions; and a nonplanar gate on the first fin between the first source and drain regions and on the second fin between the second source and drain regions, wherein the nonplanar gate includes an antiferroelectric (AFE) gate dielectric. In some embodiments, the AFE gate dielectric includes oxygen and a dopant. In some embodiments, the AFE gate dielectric includes one of: Hf or Zr. In some embodiments, the AFE gate dielectric includes alternating layers of a first layer comprising O, Hf, and the dopant; and a second layer comprising O, Zr, and the dopant. In some embodiments, the dopant includes one of: Si, Co, or Al. In some embodiments, the AFE gate dielectric has a thickness of at least 5 atomic percent. In some embodiments, the apparatus comprises a gate electrode on the AFE dielectric, wherein the gate electrode comprises one or more of: Ti, N, or Al.

In some embodiments, the apparatus comprises: a direct current (DC) contact, to receive a DC current, coupled to the gate electrode and further coupled to at least one of the first and second fins. In some embodiments, the apparatus comprises: an alternating current (AC) contact, to receive an AC current, coupled to at least one of the gate electrode, the first fin, and the second fin, wherein the first and second fins are not coupled to any other gate between the first source and drain regions.

In some embodiments, the DC contact couples to the first fin and the AC contact couples to the gate. In some embodiments, the gate electrode mechanically resonates at a first frequency when the gate is actuated with the AC current, from the AC contact, to generate periodic forces on the gate electrode. In some embodiments, the apparatus comprises a circuitry to sense the first frequency based on the DC current to the first fin when the gate resonates. In some embodiments, the DC and AC contacts each couple to the first fin. In some embodiments, the DC contact couples to the first and second fins and the AC contact couples to the gate. In some embodiments, the DC contact couples to the second fin and the AC contact couples to the first fin. In some embodiments, the apparatus comprises AC and DC sources that respectively couple to the AC and DC contacts to provide the AC and DC currents. In some embodiments, the apparatus comprises a layer of metals extending parallel to one another, wherein the layer of metals is above the first and second non-planar transistors such as to form a Bragg reflector. In some embodiments, the layer of metals is unbiased.

The use of AFE increases the strain/stress generated in the gate of the FinFET. Along with the usual capacitive drive, which is boosted with the increased polarization, additional current drive is also achieved from the piezoelectric response generated to due to AFE material. In some embodiments, the acoustic mode of the resonator is isolated using phononic gratings all around the resonator using the metal line above and vias' to body and dummy fins on the side. Increased drive signal from the AFE results in larger output signal and larger bandwidth. By applying voltage across the gate the AFE oxide, the AFE can be “pulled” to one side of the hysterics or other. By favoring one side of polarization, the voltage response to strain changes from expansion to compression. The change in the acoustic mode changes the frequency of operation as well. This enables the resonator array to be frequency programmable. Such resonator has many applications that can be used in CMOS/RF circuits. Due to typically large quality factors (QF) of the MEMS/acoustic resonators, the jitter and phase noise performance of the oscillators based on these resonators have much better performance (e.g., higher QF). Other applications can be bandpass or notch filters. Based on AFE materials, the piezoelectric coefficients of the materials is large and hence have high transduction efficiency than typical capacitive versions.

There are many technical effects of the various embodiments. For example, the AFE gate dielectric based transistors organized in an array with metal wires above, below, and/or on the sides of the transistors allows for an acoustic waveguide made inside an integrated circuit die. The resonator and/or oscillators made from the AFE gate dielectric based transistors allows for further scaling of CMOS clock networks and communication chips. The resonator and/or oscillators made from the AFE gate dielectric based transistors enables new applications like on-chip band-pass filters, notch filters, high-frequency oscillators and other RF components like circulators and isolators. The resonator and/or oscillators made from the AFE gate dielectric based transistors enables components for creating neuromorphic coupled oscillator systems. Due to a high quality factor of MEMS (micro-electro-mechanical system) devices, the transistors of various embodiments can enable low jitter high-performance circuits. Some embodiments provide improvements over on-chip resonators that use resonant body transistors (RBT). Other technical effects will be evident from the various figures and embodiments.

In the following description, numerous details are discussed to provide a more thorough explanation of embodiments of the present disclosure. It will be apparent, however, to one skilled in the art, that embodiments of the present disclosure may be practiced without these specific details. In other instances, well-known structures and devices are shown in block diagram form, rather than in detail, in order to avoid obscuring embodiments of the present disclosure.

Note that in the corresponding drawings of the embodiments, signals are represented with lines. Some lines may be thicker, to indicate more constituent signal paths, and/or have arrows at one or more ends, to indicate primary information flow direction. Such indications are not intended to be limiting. Rather, the lines are used in connection with one or more exemplary embodiments to facilitate easier understanding of a circuit or a logical unit. Any represented signal, as dictated by design needs or preferences, may actually comprise one or more signals that may travel in either direction and may be implemented with any suitable type of signal scheme.

The term “device” may generally refer to an apparatus according to the context of the usage of that term. For example, a device may refer to a stack of layers or structures, a single structure or layer, a connection of various structures having active and/or passive elements, etc. Generally, a device is a three-dimensional structure with a plane along the x-y direction and a height along the z direction of an x-y-z Cartesian coordinate system. The plane of the device may also be the plane of an apparatus which comprises the device.

Throughout the specification, and in the claims, the term “connected” means a direct connection, such as electrical, mechanical, or magnetic connection between the things that are connected, without any intermediary devices.

The term “coupled” means a direct or indirect connection, such as a direct electrical, mechanical, or magnetic connection between the things that are connected or an indirect connection, through one or more passive or active intermediary devices.

The term “adjacent” here generally refers to a position of a thing being next to (e.g., immediately next to or close to with one or more things between them) or adjoining another thing (e.g., abutting it).

The term “circuit” or “module” may refer to one or more passive and/or active components that are arranged to cooperate with one another to provide a desired function.

The term “signal” may refer to at least one current signal, voltage signal, magnetic signal, or data/clock signal. The meaning of “a,” “an,” and “the” include plural references. The meaning of “in” includes “in” and “on.”

The term “scaling” generally refers to converting a design (schematic and layout) from one process technology to another process technology and subsequently being reduced in layout area. The term “scaling” generally also refers to downsizing layout and devices within the same technology node. The term “scaling” may also refer to adjusting (e.g., slowing down or speeding up—i.e. scaling down, or scaling up respectively) of a signal frequency relative to another parameter, for example, power supply level.

The terms “substantially,” “close,” “approximately,” “near,” and “about,” generally refer to being within +/−10% of a target value. For example, unless otherwise specified in the explicit context of their use, the terms “substantially equal,” “about equal” and “approximately equal” mean that there is no more than incidental variation between among things so described. In the art, such variation is typically no more than +/−10% of a predetermined target value.

Unless otherwise specified the use of the ordinal adjectives “first,” “second,” and “third,” etc., to describe a common object, merely indicate that different instances of like objects are being referred to, and are not intended to imply that the objects so described must be in a given sequence, either temporally, spatially, in ranking or in any other manner

For the purposes of the present disclosure, phrases “A and/or B” and “A or B” mean (A), (B), or (A and B). For the purposes of the present disclosure, the phrase “A, B, and/or C” means (A), (B), (C), (A and B), (A and C), (B and C), or (A, B and C).

The terms “left,” “right,” “front,” “back,” “top,” “bottom,” “over,” “under,” and the like in the description and in the claims, if any, are used for descriptive purposes and not necessarily for describing permanent relative positions. For example, the terms “over,” “under,” “front side,” “back side,” “top,” “bottom,” “over,” “under,” and “on” as used herein refer to a relative position of one component, structure, or material with respect to other referenced components, structures or materials within a device, where such physical relationships are noteworthy. These terms are employed herein for descriptive purposes only and predominantly within the context of a device z-axis and therefore may be relative to an orientation of a device. Hence, a first material “over” a second material in the context of a figure provided herein may also be “under” the second material if the device is oriented upside-down relative to the context of the figure provided. In the context of materials, one material disposed over or under another may be directly in contact or may have one or more intervening materials. Moreover, one material disposed between two materials may be directly in contact with the two layers or may have one or more intervening layers. In contrast, a first material “on” a second material is in direct contact with that second material. Similar distinctions are to be made in the context of component assemblies.

The term “between” may be employed in the context of the z-axis, x-axis or y-axis of a device. A material that is between two other materials may be in contact with one or both of those materials, or it may be separated from both of the other two materials by one or more intervening materials. A material “between” two other materials may therefore be in contact with either of the other two materials, or it may be coupled to the other two materials through an intervening material. A device that is between two other devices may be directly connected to one or both of those devices, or it may be separated from both of the other two devices by one or more intervening devices.

Here, multiple non-silicon semiconductor material layers may be stacked within a single fin structure. The multiple non-silicon semiconductor material layers may include one or more “P-type” layers that are suitable (e.g., offer higher hole mobility than silicon) for P-type transistors. The multiple non-silicon semiconductor material layers may further include one or more “N-type” layers that are suitable (e.g., offer higher electron mobility than silicon) for N-type transistors. The multiple non-silicon semiconductor material layers may further include one or more intervening layers separating the N-type from the P-type layers. The intervening layers may be at least partially sacrificial, for example to allow one or more of a gate, source, or drain to wrap completely around a channel region of one or more of the N-type and P-type transistors. The multiple non-silicon semiconductor material layers may be fabricated, at least in part, with self-aligned techniques such that a stacked CMOS device may include both a high-mobility N-type and P-type transistor with a footprint of a single finFET.

Here, the term “backend” generally refers to a section of a die which is opposite of a “frontend” and where an IC (integrated circuit) package couples to IC die bumps. For example, high level metal layers (e.g., metal layer 6 and above in a ten-metal stack die) and corresponding vias that are closer to a die package are considered part of the backend of the die. Conversely, the term “frontend” generally refers to a section of the die that includes the active region (e.g., where transistors are fabricated) and low-level metal layers and corresponding vias that are closer to the active region (e.g., metal layer 5 and below in the ten-metal stack die example).

It is pointed out that those elements of the figures having the same reference numbers (or names) as the elements of any other figure can operate or function in any manner similar to that described, but are not limited to such.

FIG. 1A illustrates a tri-gate transistor 100 with anti-ferroelectric (AFE) material in the gate of the transistor, in accordance with some embodiments of the disclosure. FIG. 1B illustrates a cross-section 120 of the tri-gate transistor with AFE material in the gate of the transistor, in accordance with some embodiments of the disclosure.

So as not to obscure the various embodiments, the transistor described herein is a tri-gate transistor or a FinFET. However, the embodiments are generally applicable to other types of transistors. In some embodiments, the tri-gate transistor (or FinFET) 100 is fabricated on a substrate 101. The FinFET 100 comprises source region 102 and drain region 103 coupled to a channel (not shown) of a fin. The gate is formed over the fin and comprises spares 104 and 105, AFE material 106 (e.g., AFE dielectric), and gate electrode 107. The gate electrode is further coupled to gate contact 108. The source region 102 and drain region 103 are connected to contacts 109, and 110, respectively. Spacers 104 and 105 are located between gate 107 and the source/drain regions, which are on top of layer 101. The fin is the thin strip of semiconductor material that is orthogonal to the gate. The fin is formed on layer 101.

Layer 101 may be a substrate, oxide, and the like. The fin may be formed from the substrate 101. In some embodiments, substrate 101 includes a suitable semiconductor material such as but not limited to, single crystal silicon, polycrystalline silicon and silicon on insulator (SOI), or similar substrates formed of other semiconductor materials such as germanium, silicon germanium or a suitable group III-V compound.

The source and drain regions 102 and 103, respectively, are highly doped (with epitaxial growth in some embodiments). A conductive channel of the finFET resides on the outer sides of the fin beneath the AFE gate dielectric 108. Current runs along both “sidewalls” of the fin as well as along the top side of the fin. Because the conductive channel essentially resides along the three different outer, planar regions of the fin, the particular finFET of FIG. 1A is typically referred to as a “tri-gate” finFET. Other types of finFETs exist (such as “double-gate” finFETs, which are included in other embodiments and in which the conductive channel principally resides only along both sidewalls of the fin and not along the top side of the fin).

As shown, source structure 102 and drain structure 103 are within substrate 101 adjacent to gate electrode 107 and AFE 106 of transistor 100. In some embodiments, source structure 102 and drain structure 103 extend under dielectric spacer 104. The dielectric spacer 104 may include a material such as but not limited to silicon nitride, carbon doped silicon nitride, silicon oxynitride, or silicon carbide.

Source structure 102 and drain structure 103 may include epitaxially deposited materials that depend on the type of substrate 106. In some embodiments, source structure 102 and drain structure 103 include a silicon alloy such as silicon germanium or silicon carbide and substrate 101 includes silicon. In some embodiments, the silicon alloy may include dopants such as boron, arsenic, or phosphorous. In some embodiments, the source structure 102 and drain structure 103 include one or more alternate semiconductor materials such as doped-germanium or a group III-V material or alloy.

In an embodiment, gate contact 108, source contact 109, and drain contact 110, include a material such as but not limited to tungsten, titanium, gold, scandium or graphene. In some embodiments, gate contact 108, source contact 109, and drain contact 110 may include a contact adhesion layer. In some embodiments, the contact adhesion layer is chosen to minimize barrier height for optimizing electron and hole conduction between source and drain contacts 106 and 110 and source and drain structures 102 and 103, respectively. Examples of such adhesion layers include Ti or Ni. The thickness of the adhesion layer can range from 3-10 nm (nanometers).

In some embodiments, in isolation (not shown) is adjacent to the source 102 and drain 103 in a recess in the substrate 101. In some embodiments, the isolation includes any material that has sufficient dielectric strength to provide electrical isolation such as, but not to, limited silicon dioxide, silicon nitride, silicon oxynitride, carbon doped nitride and carbon doped oxide. In some embodiments, a dielectric (e.g., an oxide) is fabricated on the isolation, on the source 102, drain 103 and adjacent to the source contact 108, drain contact 110, gate contact 108 and the dielectric spacer 105.

In some embodiments, AFE 106 is a dielectric layer which is crystalline and includes oxygen and a dopant. For purposes of inducing electric polarization, AFE gate dielectric layer 106 is crystalline and comprises oxygen and a dopant. The origin of the anti-ferroelectric behavior is an electric field induced phase transition between the non-polar tetragonal (t) and the polar ferroelectric orthorhombic (o) phase. AFE is utilized as a gate dielectric layer 106 to provide this excess charge through the principle of electric polarization. The atoms in the antiferroelectric material are said to be electrically polarized when the electron clouds in the atoms are shifted relative to their respective nuclei by an externally applied electric field, such as the field resulting from the application of a gate voltage. The polarization leads to the creation of an electric dipole and consequently an internal electric field. Though the internal electric field produced by the polarization may have a magnitude which may be less than the magnitude of an externally applied electric field, the net effect of all the dipoles in the dielectric layer may be non-negligible.

For instance, depending on the material of the dielectric layer, the magnitude of the internal electric field may be sizable enough to increase the amount of charge to the channel and thus appreciably increase the drive current. Furthermore, because the internal electric field results from the electric polarization, the phenomenon of increased drive current only manifests when the gate is actually biased. This has an added advantage that, since the drain voltage is not increased, an off-state leakage of the transistor is not impacted when the gate voltage is raised to increase the drive current.

In some embodiments, the crystalline hafnium oxide is tetragonal. In some embodiments, an AFE property is observed in AFE gate dielectric layer 106 that includes a crystalline hafnium oxide and a dopant to promote the inducement of more charge into a channel (under the gate 107). In some embodiments, AFE gate dielectric layer 106 includes a crystalline hafnium oxide that is doped with atoms such as but not limited to silicon (Si), aluminum (Al) or cobalt (Co). When AFE gate dielectric layer 102 includes hafnium oxide and a silicon dopant, the dopant concentration can be as much as 9 atomic percent. In some embodiments, the silicon dopant concentration is in the range of 5 to 7 atomic percent.

In some embodiments, when AFE gate dielectric layer 106 includes hafnium oxide (HfO) and a cobalt dopant, the dopant concentration can be as much as 10 atomic percent. In another example, when AFE gate dielectric layer 106 includes hafnium oxide and an aluminum dopant, the dopant concentration can be as much as 10 atomic percent.

In some embodiments, AFE gate dielectric layer 106 includes a crystalline zirconium oxide that is doped with atoms such as but not limited to silicon or cobalt. When AFE gate dielectric layer 106 includes a zirconium oxide and a silicon dopant, the dopant concentration can be as much as 9 atomic percent. In an exemplary embodiment, the silicon dopant concentration is in the range of 5 to 7 atomic percent. When AFE gate dielectric layer 106 includes zirconium oxide and a cobalt dopant, the dopant concentration can be as much as 35 atomic percent.

In an exemplary embodiment, AFE gate dielectric layer 106 has a thickness of not less than 2 nm and not more than 10 nm. A thickness of 2 nm or greater is advantageous in reducing the leakage current of transistor 100 when the gate is not biased.

In some embodiments, AFE gate dielectric layer 106 includes alternating layers where the first layer includes hafnium and oxygen and the second layer includes zirconium and oxygen. In some embodiments, each of the alternating layers include dopants. In some embodiments, AFE gate dielectric layer 106 includes alternating layers where the first layer includes a stoichiometric hafnium oxide and the second layer includes a stoichiometric layer of zirconium oxide. In some embodiments, AFE gate dielectric layer 106 includes alternating layers where the first layer includes a stoichiometric hafnium oxide and a silicon dopant and the second layer includes a stoichiometric layer of zirconium oxide and the silicon dopant.

In some embodiments, when AFE gate dielectric layer 106 includes alternating layers of a hafnium oxide and a silicon dopant, and zirconium oxide and a silicon dopant, the dopant concentration can be as much as 6 atomic percent in each of the layers. AFE gate dielectric layer 106 may include any number of such alternating layers. In some embodiments, AFE gate dielectric layer 106 includes a single layer of hafnium and oxygen with optional dopants on substrate 106 and a single layer of zirconium and oxygen with optional dopants on the single layer of hafnium and oxygen with optional dopants. In some embodiments, gate dielectric layer 106 includes a single layer of zirconium and oxygen with optional dopants on substrate 101 and a single layer of hafnium and oxygen with optional dopants on the single layer of zirconium and oxygen with optional dopants. In some other embodiments, AFE gate dielectric layer 106 includes pairs of such layers in either orientation that are stacked. The stack may include any number of pairs of such layers such as two pairs, three pairs, four pairs, or more.

In some embodiments, in an unpowered state, atoms in the AFE dielectric layer 106 are non-polarized. In some embodiments, upon application of a gate bias voltage on gate contact 108, the electron clouds in the atoms of the AFE gate dielectric layer 106 become spatially separated from their respective nuclei leading to the formation of electric dipoles. The combined effect of the dipoles leads to the formation of an internal induced electric field. The resultant electric field induces charges in a channel under the AFE gate dielectric layer 106. When a drain bias is applied to the transistor 100 via drain contact 110, and the gate bias on contact 108 is above a threshold voltage for current to flow in the channel, the charge induced by the polarized electric field augments the drive current in the transistor. The direction of the induced electric field in the AFE gate dielectric layer 106 depends on the polarity of the applied gate bias. As such, an AFE gate dielectric layer 106 can be readily adapted to complimentary CMOS logic transistor applications.

In some embodiments, the AFE gate dielectric layer 106 includes Hf_(x)Zr_(1−x)O₂ where X is between 0.01 and 0.05. In some embodiments, AFE gate dielectric layer 106 includes a Hf_(0.5)Zr_(0.5)O₂, where the Hf_(0.5)Zr_(0.5)O₂ AFE gate dielectric layer 106 includes a Si or Al dopant. The dopant concentration of Si or Al is in the range of 1-10%.

In some embodiments, gate electrode 107 has a work function in the range of 3.8 eV-4.5 eV. Similar to traditional MOSFETs, the work function of gate electrode 107 in transistor 100 may be tuned to optimize threshold voltage. Depending on whether transistor 100 is an N-channel MOSFET or a P-channel MOSFET, gate electrode 107 may include a P-type work function metal or an N-type work function metal to provide transistor 100 as a PMOS or an NMOS transistor.

For a PMOS transistor, metals that may be used for gate electrode layer 107 include, but are not limited to, ruthenium, palladium, platinum, cobalt, nickel, and conductive metal oxides, e.g., ruthenium oxide. A P-type metal layer may enable the formation of a PMOS gate electrode 107 with a work function between about 4.9 eV and about 5.2 eV. For an NMOS transistor, metals that may be used for gate electrode 107 include, but are not limited to, hafnium, zirconium, titanium, tantalum, aluminum, alloys of these metals, and carbides of these metals such as hafnium carbide, zirconium carbide, titanium carbide, tantalum carbide, and aluminum carbide. An N-type metal layer may enable the formation of an NMOS gate electrode with a work function that is between about 3.9 eV and about 4.2 eV.

In some embodiments, gate electrode 107 includes a gate material such as but not limited to titanium nitride, tantalum nitride, and titanium aluminum nitride. In some embodiments, gate electrode 107 includes a stack of two or more conductive layers, where a first conductive layer that is directly on AFE gate dielectric layer 106 sets the work function of gate electrode 107, and the remaining one or more conductive layers include fill layers. In the illustrative embodiment, AFE gate dielectric layer 106 includes a portion on a sidewall of the gate electrode 107.

In some embodiments, gate electrode 107 includes titanium nitride, AFE gate dielectric layer 106 includes hafnium and oxygen and a silicon dopant, and gate electrode 110 and AFE gate dielectric layer 102 each have a tetragonal crystal structure. In some embodiments, gate electrode 107 includes titanium nitride, AFE gate dielectric layer 106 includes zirconium and oxygen and a cobalt dopant.

FIG. 2 illustrates an apparatus 200 comprises a series of tri-gate transistors that collectively form a resonator, in accordance with some embodiments of the disclosure. While apparatus 200 includes three transistors there is no maximum or minimum number of transistors for various embodiments of the invention). Specifically, FIG. 2 shows a cross-sectional view of a multi-fin structure on the x-y plane with z at the fin center. FIG. 2 includes a tri-gate transistor with a source node 102 coupled to a channel 201 of a fin, which then couples to a corresponding drain node 103. Channel 201 couples to AFE gate dielectric 106 and gate 107. Other transistors include source nodes 102 ₂₋, channels 202, 203, 204, (all of which couple to gate 107 via separate gate dielectric portions 106), and drain nodes 103 ₂₋₄.

FIG. 3 illustrates a parallel plate capacitor model 300 for modeling resonator actuation, in accordance with some embodiments. Here, the DC and AC bias are provided by source 301 to capacitor 302 resulting in actuation 303. The driving and sensing schemes for a piezo-resistive (PZR) material modeled by the capacitor 302 include:

$F_{ac} = {{\frac{\varepsilon A}{d^{2}}V_{DC}v_{in}} + {2e_{33}\frac{A}{d^{2}}v_{in}}}$

where d, ∈, A, V_(DC), and v_(in) respectively, correspond to gap thickness, permittivity, capacitor area, DC bias, and AC bias and result in actuation 303 due to actuation force F_(ac). The PZR material is an AFE material that is used in gate dielectric 106, in accordance with various embodiments. Here, e₃₃ is the PZR coefficient that represents the voltage and force is the third dimension. The PZR coefficient e₃₃ is an active contributor to the polarization for a given applied electric field.

FIG. 4 illustrates a cross-section 400 of a single fin transistor of FIG. 2 and its capacitive actuation, in accordance with some embodiments. Here, the source 102 ₁ is biased by source 401 providing AC input voltage v_(in), the drain 103 ₁ is biased by source 402 providing AC input voltage v_(in), and the gate 107 is biased by source 403 providing V_(DD). As such, capacitive actuation 404 and 405 is induced across gate dielectric 106. The AFE dielectric 106 helps provide a larger F_(ac) for the same bias inputs. The V_(DD) DC input is used to create capacitance across the fin and AFE dielectric 106.

FIG. 5 illustrates apparatus 500 comprises a series of tri-gate transistors that collectively form a resonator showing mechanical resonance within the gate 107 of the multiple tri-gate resonator, in accordance with some embodiments. Apparatus 500 is same as apparatus 200 but for the illustration of the mechanical resonance within the gate 107. As a result of the actuation described with reference to FIGS. 3-4 , mechanical resonance is achieved within the gate 105. Here, line 501 corresponds to longitudinal displacement of gate 107 and line 502 corresponds to dynamic stress within gate 107.

FIG. 6 illustrates piezo-resistive sensing apparatus 600 in a piezo-resistive resonator (PZR), in accordance with some embodiments. To sense periodic stress 502 (e.g., 301), gate 107 is biased with V_(DD) by source 403 to help provide capacitance and generate an inversion layer for the channels that couple sources/drains 102 ₁₋₂ to one another, and a DC bias is applied to drain 102 ₂ by source 402 to flow MOSFET current 503 through a fin. For sensing, the source 102 ₁ is coupled to ground GND1. When gate 107 resonates, DC current 503 is piezo-resistively modulated by the dynamic tensile/compressive stress 502 within the fin.

FIG. 7A illustrates a one dimensional (1D) model 700 of a resonator where the fins are assumed to be tall and actuated when supply V_(DD) is supplied to the source and drain components during gate dielectric actuation, in accordance with some embodiments. FIG. 7A is similar to FIG. 2 but showing the biasing scheme and actuation. Here, the term being tall generally refers to a height of a fin divided by its width to be greater than 3.0. It includes ratios such as 3.5, 4.0, 4.5, 5.0, 5.5, 6.0 and the like in various embodiments.

For actuation, V_(DD) is supplied by source 701 to the source regions 102 ₁₋₄ during gate actuation. The drain regions 103 ₁₋₄ in this example are coupled to ground (GND1). For actuation, the gate 105 is coupled to source 702 and supplied v_(in) AC to gate 107, along with V_(DD). Here, V_(DD) generates an inversion layer for the channel and also provides capacitance about the gate dielectric. In this example, fin-to-fin pitch is indicated by 703. While the embodiment here illustrates V_(DD) is supplied by source 701 to the source regions 102 ₁₋₄ during gate actuation 704, 706, 707, 709, 710, 712, 713, 714, in other embodiments V_(DD) may be supplied to drain regions 103 ₁₋₄. Note, when drain regions are supplied V_(DD), source regions are tied to ground during gate actuation. The v_(in) AC to gate 107 (e.g., 10 to 100 mV) and V_(DD) (e.g., 0.7 to 1.2 V, depending on gate oxide thickness) excites the mechanical modes of the device. For example, the applied time varying voltage (DC+AC) on the gate 107 produces a time varying force on the channel material, which leads to acoustic resonance of the gate 107, putting an AC strain on the channel section/fin.

For sensing, V_(DD) (e.g., 0.7 to 1.2V) is supplied to the source/drain regions and V_(DD) (e.g., 0.7 to 1.2 V) is supplied to gate 107 to again generate an inversion layer for the channel and also provide channel inversion capacitance about the gate dielectric. The currents 705, 708, 711 can then be sensed that represent the piezo-resistive signal.

FIG. 7B illustrates plot 720 showing actuation induced stress distribution in the gate of the transistor. The results are for first, second, and third modes (i.e., a fundamental “first mode” frequency for the first mode along with second and third harmonic frequencies of the fundamental frequency for the second and third modes) of the resonator device of FIG. 7A, where the fin to fin pitch is 180 nm (measured as the distance between two adjacent fin channels) 703, the fins are silicon fins, and gate 107 is a tungsten gate (but other embodiments are not so limited). The f-Q product is 2×10¹³ Hz with f and Q being the frequency and quality factor for the resonator device, respectively. In FIG. 7B, the stress is maximized at the fin (one of which is designated with the vertical bar 721 at about 90 nm on the y axis) resulting in a maximum piezo-resistive signal detected by current 705 (or currents 708, 711).

In other words, for the fundamental frequency f₁=27 GHz the maximum stress of about 250 MPa is present at the fin, such as the fin described by 102 ₄ and 103 ₄ or any other fin along the gate of the resonator. The second mode (f₂=54 GHz—the second harmonic of f1) has a maximum stress of about 100 MPa and the third mode (f₃=82 GHz—the third harmonic of f1) has a maximum stress of about 75 MPa.

FIG. 7C illustrates a plot 730 showing a relative change of resistance in three modes of operation, in accordance with some embodiments. In FIG. 7C, for silicon p-type parameters, the relative change of resistance ΔR/R for the first mode is about 16%, which is significantly larger than those of RBTs with similar f-Q product values (which allows for easier detection of the resonant frequency). The ΔR/R for the second mode is about 5.9% and the ΔR/R for the third mode is about 2.7%.

FIG. 8A illustrates a biasing scheme 800 where dielectric actuation is skipped at every other fin while one half of the fines are used for sensing, in accordance with some embodiments.

In the first case, as also discussed with regard to FIG. 7A, all the fins are actuated when V_(DD) is supplied to the source/drain regions during gate dielectric actuation 704, 706, 707, 709, 710, 712, 713, 714. Also, to generate the gate actuation v_(in) AC is supplied to gate 107, along with V_(DD). For sensing, current 705, 708, 711 from source 701 is supplied to the source regions 102 ₁₋₄ and 0 V to the drain region 103 ₁₋₄. V_(DD) and v_(in) AC is supplied to gate 107. In this embodiment of FIG. 7A, each of the fins is used for both driving and sensing. The PZR device pitch (e.g., distance between fins that are actively driven with current during actuation, the distance being measured “mid fin” to “mid fin”) 703 determines the resonant frequencies.

In the second case, as discussed with reference to FIG. 8A the dielectric actuation is skipped at every other fin (e.g., half of the fins are used for actuation while the other half of fins are used for sensing). In this example, source regions 102 ₂ and 102 ₄ are used for driving using source 801, source regions 102 ₁ and 102 ₃ are used for sensing using source 802. Gate 107 is biased by source 803 (like source 702). Here, drain regions 103 ₂ and 103 ₄ are also biased by source 804. In some embodiments, source 804 is a DC bias voltage to ensure operation at the correct bias condition. In an alternate embodiment, sources 801 and 804 have alternating drivers. For example, the driving signal by source 801 is out of phase relative to the phase of the driving signal by source 805 as shown resonator 840 by FIG. 8D. In this example, source region 1022 is coupled to driver 805 while source region 1024 is coupled to driver 801, where driver 805 is out of phase by 0 degrees. As such, with reference to FIG. 12 , the drive MOSCAPs 1201 and 1203 will have opposite polarity of the drive voltage by source 801.

Referring back to FIG. 8A, the alternating of fins for dielectric actuation doubles the PZR device pitch 703 to twice that of the fin pitch 805. Thus, while fin pitch may only be 180 nm the “PZR device pitch” is twice that amount at 360 nm, which scales the resonant frequencies by a factor of ½. Thus, f₁ for the first operation mode (with reference to FIG. 7A) is 27 GHz but due to the PZR device pitch change the fundamental f₁ frequency for the second operation mode of FIG. 8A is 13 GHz (i.e., half of 27 GHz). The approach can be extended to achieve scaling factors of ⅓, ¼, and the like. Another advantage of the second operation mode (of FIG. 8A) is that since drive and sense fins are separated, there is reduced feed-through current to the sense fins, which improves signal to noise ratio for the PZR.

FIG. 8B illustrates plot 820 showing stress distribution and frequency sweeps for schemes of FIG. 7A and FIG. 8A, in accordance with some embodiments. By doubling the length of the period (i.e., the second operation mode (ii) as described by FIG. 8A), resonant modes are obtained that are not available for the single period case. For plot 800, again a maximum stress is at the fin located at about 90 nm on the y-axis for the first operation mode (i) discussed with reference to FIG. 7A. However for the second operation mode (ii), as described by FIG. 8A, the maximum stress shifts locations in correspondence to its lower frequency. In other words, in an embodiment, the maximum stress for the second operation mode (ii) is located at each of the fins except the maximum stress alternates plus (first vertical bar 821 at about 90 nm) to minus (other vertical bar 822) maximum stress. The maximum positive stress occurs at the driven fins. More specifically, the maximum stress basically means maximum “magnitude” of stress when dealing with dynamic stress. For the two vertical bars in plot 800 (that correspond to fins with the left bar/right bar assumed to respectively be the drive fin/sense fin for the double pitch case (dashed curve)), both fins experience the maximum stress but each with opposite phase (drive fin has positive maximum stress and sense fin has negative maximum stress). At some other time point, the phase may be reversed and the drive fin may experience the negative maximum stress with the sense fin experiencing the positive maximum stress.

FIG. 8C illustrates plot 830 showing twice the change of resistance peaks as compared to the higher frequency associated with operation mode of FIG. 7A, in accordance with some embodiments. Plot 830 shows twice the ΔR/R peaks as compared to the higher frequency associated with the first operation mode (i). This occurs because the frequency axis is the same but the resonance occurs at a lower frequency. Therefore, there are more peaks over the same x-axis range of frequency.

FIG. 9A illustrates plot 900 showing polarization versus electric field hysteresis loop for an AFE material. Plot 900 illustrates a hysteresis characteristic 901 of AFE gate dielectric layer 106 as the magnitude of the electric field is increased and decreased with respect to a threshold value. Plot 900 also illustrates that hysteresis characteristic 901 appears regardless of the direction of the applied electric field. In other words, AFE gate dielectric layer 106 increases charge to the channel layer of either polarity, thus enabling operation of a CMOS transistor.

When the applied external electric field, E, reaches a magnitude A in as shown in plot 900, the atoms in AFE gate dielectric layer 106 become electrically polarized (e.g., the electron clouds in the atoms are shifted relative to their respective nuclei by an externally applied electric field). Furthermore, the dipoles that form in AFE gate dielectric layer 106 become aligned under the influence of the external electric field and the polarization, P, in AFE gate dielectric layer 106 increases in magnitude from P₁ to P₂.

When the applied external electric field is decreased in magnitude from A to B, the dipoles slowly reverse direction, leading to a reduction in the effective polarization, P, until a critical electric field value is reached where the dipoles return to their original orientation and the polarization drops to P₁.

When the external electric field is turned off, there is no net polarization in AFE gate dielectric layer 106. The absence of net polarization in AFE gate dielectric layer 106 introduces no threshold voltage shift in the transistor 100.

FIG. 9B illustrates plot 920 showing current voltage relationship in transistor 100 including AFE gate dielectric 106. As shown, when gate electrode 108 of transistor 100 is biased respect to source contact 109, and a positive voltage bias is applied between drain contact 110 and source contact 109, an electric field is set up or established in AFE gate dielectric layer 106. As the magnitude of the applied gate bias, V_(G), is increased to a critical value, A, the electric field in AFE gate dielectric layer 106 reaches the critical value, A, such that AFE gate dielectric layer 106 becomes polarized.

In some embodiments, the effect of the electric polarization results in an increase in the amount of charge supplied to the channel formed directly under the AFE gate dielectric layer 106 in the substrate 101. In some embodiments, the increase in the charge (at point A) serves to effectively increase the drive current of the transistor 100 by an amount ΔI as illustrated in plot 920. The increase in the drive current is not brought about by increasing the drain to source voltage, which is held constant. As the gate voltage is reduced (e.g., from A to B), the effect of the polarization in the AFE gate dielectric layer 106 diminishes and no extra charge is supplied to the channel to increase the transistor drive current. The phenomenon of increased drive current manifests when the gate is actually biased because the electric polarization results when the gate 107 is biased above a threshold value (A). In some embodiments, the momentary effect of increasing drive current, over a small range of gate voltage values, is brought about without increasing the drain to source bias and results with no net penalty to off-state leakage of the transistor 100.

FIGS. 10A-C illustrate acoustic waveguide 1000, 1020, 1030, and 1040, respectively, with Bragg reflectors adjacent to a multi-gate transistor having AFE material, in accordance with some embodiments. With the backdrop of AFE based transistors discussed herein that are biased to operate as high efficiency resonators, phononic trans-conductance of the resonating signal can be achieved using Bragg reflectors, in accordance with some embodiments.

With reference to FIG. 10A, in some embodiments, metal interconnects are formed in parallel above the AFE gate dielectric based transistors. These metal interconnects may not couple to one another and may be unbiased. For example, metal layer 1 1001 interconnects are fabricated parallel over AFE gate dielectric based transistors forming an acoustic waveguide for resonating signals to traverse between the surface of the transistors and the metal layer 1 1001 interconnects. To further guard the propagation of resonating signals, additional metal layers 1002 through 100N (where ‘N’ is greater than 2) over interconnects 1001 may be fabricated. These interconnects 1001 through 100N may not couple with one another and may be unbiased. In some embodiments, interconnects 1001 through 100N are coupled to ground or a power supply.

While the embodiment of FIG. 10A illustrates metal interconnects traversing along the y-axis, they can also traverse along the x-axis. In some embodiments, metal layer 1001 runs orthogonal to metal layer 1002. For example, metal layer 1001 extents in the y-direction, while metal layer 1002 extends in the x-direction.

In some embodiments, metal or poly structures are along formed on either sides of the set of transistors of waveguide 1000. For example, poly or metal layer 0 structures along the y-direction may be formed over substrate 101. This allows to enclose the waveguides more to retain the trans-conductance of the resonating signal along the y-direction.

FIG. 10B illustrates a cross-sectional view (cross-section AA) 1020 of FIG. 10A. As seen, the metal layers 1001 and 1002 are not directly coupled to one another using vias, and are used for providing the “walls” for the acoustic resonator. While two metal layers 1001 and 1002 are shown, additional or fewer metal layers may be used for trans-conducting resonating signals through the acoustic waveguide.

FIG. 10C illustrates a cross-sectional view 1030 of another acoustic waveguide. Here, transistors with AFE gate dielectric are formed in the backend of the die compared to the transistors shown in FIG. 10B, which are formed in the frontend of the die. In one such embodiments, metal layers can be encased around the transistors for form a fully metal encased acoustic waveguide within the die. In this example, two metal layers 1031 and 1032 are formed above the backend transistors with AFE gate dielectric, and two metal layers 1033 and 1034 are formed below the backend transistors with AFE gate dielectric. In some embodiments, additional or fewer metal layers may be used for trans-conducting resonating signals through the acoustic waveguide. In some embodiments, metal layers may also be fabricated along the sides of the backend transistors such that they are fully encased by metal layers. In some embodiments, alternating metal layers may be orthogonal to one another. For example, metal layer 1033 is orthogonal to metal layer 1034.

FIG. 10D a cross-sectional view 1040 of two acoustic waveguides, one formed in the frontend and another formed in the backend. In some embodiments, some metal layers used for forming the first acoustic waveguide (e.g., waveguide near the frontend) can also be used for providing Bragg reflectors for the backend AFE gate dielectric based transistors. Other modifications and alternatives described with reference to other embodiments are also applicable here. For example, metal layers can be formed along the sides of the transistors for further improve the trans-conductance of the resonating signals.

FIG. 10E illustrates another acoustic waveguide 1050. Compared to FIG. 10A, here metal layers 1051 through 105N (where ‘N’ is a number greater than 2) are formed on top of one another covering the resonating transistors. Here, solid metal layers are used without gaps. These metal layers 1051 through 105N may not couple with one another and may be unbiased. In some embodiments, the metal layers 1051 through 105N are coupled to ground or a power supply.

FIG. 10F illustrates another acoustic waveguide 1060. Compared to FIG. 10A, here metal layers form a mesh such that alternating layers are orthogonal to one another. For example, layer 1002 a is orthogonal to layer 1003 and 1001, wherein layers 1003 and 1001 are parallel to one another. Any number of layers can be stacked over the resonating transistors. These metal layers 1001, 1002 a, 1003, and so on may not couple with one another and may be unbiased. In some embodiments, these metal layers are coupled to ground or a power supply.

FIG. 10G illustrates a cross-section of the acoustic waveguide 1060 of FIG. 10F. Here, metal layers 1002 a and 1004 a extend along the y-axis while metal layers 1001 and 1003 extend along the x-axis.

FIGS. 11A-B illustrate a cross-section 1100 of an acoustic waveguide and a plot 1110 showing frequency modes, respectively. The plot 1110 shows formation of acoustic phononic crystals above the multi-gate transistor having AFE material, in accordance with some embodiments. Cross-section 1100 is similar to cross-section 1020 but along another cut (e.g., along the y-axis).

Plot 1110 shows that adding metal Bragg reflectors make acoustic phononic crystals (PnCs) above the transistors. Four frequency bands are shown in plot 1100. The cut off of the frequency bands (e.g., f1 and f2) depend on the width or height h1, h2, h3 of the interconnects and gaps g1, g2, and so on between the interconnects. The band from frequency 0 to f1 is the first PnC (band (band 1). The band between f1 and f2 is the silicon bandgap. The band between f2 and f3 is the second PnC band (PnC band2). The dotted line shoes the various available frequency modes in substrate 101. As discussed with reference to FIGS. 10C-D, when the AFE gate dielectric based transistors are in the backend, reflectors can be formed on the top and on the bottom both. In some embodiments, dummy gates (not shown) with different spacing can be used as reflectors in the plane of the device.

FIG. 12 illustrates apparatus 1200 showing a plurality of differential drivers and sensors to provide driving and sensing modes through an array of resonators formed using Bragg reflectors adjacent to a multi-gate transistor having AFE material, in accordance with some embodiments. Apparatus 1200 is a schematic illustration of FIG. 8A where driving transistors alternate between sensing transistors. Here, two drivers 1201 and 1203 and one sensing circuitry 1202 is shown. The gate terminals 107 of all transistors are biased by source 803. The driving transistors of driver 1201 and diver 1203 are configured as capacitors (MOSFET capacitors) with drain and source terminals coupled together and driven by sources 801 and 804. The sensing transistors have their source terminals coupled to ground and their drain terminals coupled to source 802 to sense the current through them. Any number of alternating driving and sensing circuitries can be used.

FIG. 13 illustrates flowchart 1300 of a method for forming an acoustic waveguide with Bragg reflectors adjacent to a multi-gate transistor having AFE material, in accordance with some embodiments. While the following blocks (or process operations) in the flowchart are arranged in a certain order, the order can be changed. In some embodiments, some blocks can be executed in parallel.

At block 1301, a first interconnect (e.g., 1001, 1031) is formed comprising metal (e.g., Cu, Al, Graphene, Cobolt), wherein the first interconnect is on a first layer (e.g., metal layer 4). At block 1302, a second interconnect (e.g., 1002, 1032) is formed comprising metal, wherein the second interconnect is on the first layer and is also parallel to the first interconnect, and wherein the first and second interconnect are not coupled to one another. At block 1303, a first transistor is fabricated including a first fin that includes first source and drain regions, and a first channel between the first source and drain regions. At block 1304, a second transistor is fabricated including a second fin that includes second source and drain regions, and a second channel between the second source and drain regions. At block 1305, a gate is fabricated on the first fin between the first source and drain regions and on the second fin between the second source and drain regions, wherein the gate includes an antiferroelectric (AFE) gate dielectric; and wherein the first and second interconnects are above the first and second transistors and the nonplanar gate.

In some embodiments, the first and second metal interconnects are unbiased. In some embodiments, the first and second transistors and the gate are positioned in the backend (e.g., FIGS. 10C-D). In some embodiments, the method further comprises fabricating a third interconnect comprising metal, wherein the third interconnect is on a second layer (e.g., metal 1). In some embodiments, the method comprises forming a fourth interconnect (e.g., metal 0) comprising metal, wherein the fourth interconnect is on the second layer and is also parallel to the third interconnect, wherein the third and fourth interconnects are not coupled to one another, and wherein the third and fourth interconnects are below the first and second transistors and the gate.

FIG. 14 illustrates a smart device or a computer system or a SoC (System-on-Chip) 1600 with an acoustic waveguide with Bragg reflectors adjacent to a multi-gate transistor having AFE material, according to some embodiments of the disclosure.

FIG. 14 illustrates a block diagram of an embodiment of a mobile device in which flat surface interface connectors could be used. In some embodiments, computing device 1600 represents a mobile computing device, such as a computing tablet, a mobile phone or smart-phone, a wireless-enabled e-reader, or other wireless mobile device. It will be understood that certain components are shown generally, and not all components of such a device are shown in computing device 1600.

In some embodiments, computing device 1600 includes first processor 1610 with an acoustic waveguide with Bragg reflectors adjacent to a multi-gate transistor having AFE material, according to some embodiments discussed. Other blocks of the computing device 1600 may also include one or more devices according to any one of devices of FIGS. 1-12 , according to some embodiments. The AFE gate dielectric based transistors with metal layers above, below, and/or on the sides provides an acoustic waveguide and a less expensive, stable, and small resonant on-chip device suitable for monolithic integration in SoCs that include radiofrequency (RF) and/or wireless components such as oscillators, filters, and other components that require resonator elements. In some embodiments, a mechanically resonant tri-gate or finFET based resonator is formed with multiple fins per gate. Periodically exciting the AFE gate dielectric regions causes periodic Coulombic forces that deflect the gate material in a periodic fashion. Thus, periodically exciting the gate forms a resonant device, such as an oscillator. An embodiment enables a PZR using a CMOS compatible tri-gate or multi-gate process. Embodiments with compact scalable PZRs fabricated in CMOS enable a large range of RF low power mobile and wireless components. The compact oscillators realized by nano-mechanical acoustic resonant devices enable non-Boolean architectures for specialized computing (e.g., pattern recognition applications that rely on synchronized resonance of arrays of oscillators).

Thus, embodiments of CMOS based nano-mechanical resonant devices described herein: (1) provide on chip resonant structures (while avoiding or limiting use of inductors and capacitors), (2) enable circuits with a wide frequency operation range (e.g., 1 GHz-100 GHz and spanning several wireless bands), (3) reduce the number of discrete components needed for wireless and RF applications, and/or (4) enable on chip frequency sources for clocking and non-Boolean computing.

Due to the high Q factor provided by AFE gate dielectric materials that form the mechanical acoustic oscillators, the frequency content of the embodiments described herein are stable, have low phase noise, and thereby obviate the need (wholly or partially) for expensive off-chip crystal oscillators for RF circuits (e.g., oscillators, resonators, switches, filters) and/or high speed input/output (I/O) systems. Such embodiments are suitable for, as an example, synchronous logic and microprocessor components requiring inexpensive, highly stable, low jitter, high frequency clock signals in a standard CMOS process. Such embodiments may also be used in, for example, narrowband RF switches or filters at high frequency.

An embodiment includes fins of varying lengths to provide tunable/multi-mode oscillators with select/switched resonator features. Different PZR pitch arrangements may also provide for tunable resonators. For example, a multiplexor may be used to vary the sense nodes and the actuating nodes discussed in FIG. 8A.

For example, in a first orientation every fin may be used for actuation, in a second orientation every other fin may be used for actuation, and in a third orientation every third fin may be used for actuation—all resulting in a user-selectable range of tunable resonant frequencies. This produces PZRs having different resonant frequencies. Various PZRs may be combined together to create re-configurable oscillators that oscillate at different frequencies, where the oscillator of a non-desired frequency can be easily switched on or off via switches coupled to the source/drains of tri-gate FETs in the PZRs. By using different combinations of PZRs, an embodiment provides frequency tuning capabilities.

At times, the gate 107 is symmetrically formed about the fin(s) and provides symmetrical sidewall forces for resonance. In other words, the forces applied to the side walls of the fin(s) are symmetric because the gate is disposed symmetrically along the sides of the fin(s). However, in other embodiments the gate 107 may not be so disposed and may instead be asymmetrically formed on the fin(s) sidewalls and consequently provide asymmetric forces that may cause the fin(s) to resonate in-plane, out-of-plane, or in a hybrid fashion between in-plane and out-of-plane resonance.

Various embodiments described herein use PZRs that provide high-Q, on-chip resonators compatible with multi-gate (e.g., tri-gate) transistor process technology. Such on-chip resonators are used for 10's of GHz RF filters and oscillators and/or novel computing systems such as the pattern recognition by synchronization of coupled nano-oscillators (i.e., non-Boolean computing). Consequently, PZRs provide improvements over RF filters realized by FBARs, which are off-chip elements that require special packaging. Further, embodiments provide improvements over coupled nano-oscillators for non-Boolean computing that include RBTs and/or resonant body oscillators (RBOs).

The various embodiments of the present disclosure may also comprise a network interface within 1670 such as a wireless interface so that a system embodiment may be incorporated into a wireless device, for example, cell phone or personal digital assistant.

In some embodiments, processor 1610 (and/or processor 1690) can include one or more physical devices, such as microprocessors, application processors, microcontrollers, programmable logic devices, or other processing means. The processing operations performed by processor 1610 include the execution of an operating platform or operating system on which applications and/or device functions are executed. The processing operations include operations related to I/O (input/output) with a human user or with other devices, operations related to power management, and/or operations related to connecting the computing device 1600 to another device. The processing operations may also include operations related to audio I/O and/or display I/O.

In some embodiments, computing device 1600 includes audio subsystem 1620, which represents hardware (e.g., audio hardware and audio circuits) and software (e.g., drivers, codecs) components associated with providing audio functions to the computing device. Audio functions can include speaker and/or headphone output, as well as microphone input. Devices for such functions can be integrated into computing device 1600, or connected to the computing device 1600. In one embodiment, a user interacts with the computing device 1600 by providing audio commands that are received and processed by processor 1610.

In some embodiments, computing device 1600 comprises display subsystem 1630. Display subsystem 1630 represents hardware (e.g., display devices) and software (e.g., drivers) components that provide a visual and/or tactile display for a user to interact with the computing device 1600. Display subsystem 1630 includes display interface 1632, which includes the particular screen or hardware device used to provide a display to a user. In one embodiment, display interface 1632 includes logic separate from processor 1610 to perform at least some processing related to the display. In one embodiment, display subsystem 1630 includes a touch screen (or touch pad) device that provides both output and input to a user.

In some embodiments, computing device 1600 comprises I/O controller 1640. I/O controller 1640 represents hardware devices and software components related to interaction with a user. I/O controller 1640 is operable to manage hardware that is part of audio subsystem 1620 and/or display subsystem 1630. Additionally, I/O controller 1640 illustrates a connection point for additional devices that connect to computing device 1600 through which a user might interact with the system. For example, devices that can be attached to the computing device 1600 might include microphone devices, speaker or stereo systems, video systems or other display devices, keyboard or keypad devices, or other I/O devices for use with specific applications such as card readers or other devices.

As mentioned above, I/O controller 1640 can interact with audio subsystem 1620 and/or display subsystem 1630. For example, input through a microphone or other audio device can provide input or commands for one or more applications or functions of the computing device 1600. Additionally, audio output can be provided instead of, or in addition to display output. In another example, if display subsystem 1630 includes a touch screen, the display device also acts as an input device, which can be at least partially managed by I/O controller 1640. There can also be additional buttons or switches on the computing device 1600 to provide I/O functions managed by I/O controller 1640.

In some embodiments, I/O controller 1640 manages devices such as accelerometers, cameras, light sensors or other environmental sensors, or other hardware that can be included in the computing device 1600. The input can be part of direct user interaction, as well as providing environmental input to the system to influence its operations (such as filtering for noise, adjusting displays for brightness detection, applying a flash for a camera, or other features).

In some embodiments, computing device 1600 includes power management 1650 that manages battery power usage, charging of the battery, and features related to power saving operation. Memory subsystem 1660 includes memory devices for storing information in computing device 1600. Memory can include nonvolatile (state does not change if power to the memory device is interrupted) and/or volatile (state is indeterminate if power to the memory device is interrupted) memory devices. Memory subsystem 1660 can store application data, user data, music, photos, documents, or other data, as well as system data (whether long-term or temporary) related to the execution of the applications and functions of the computing device 1600.

Elements of embodiments are also provided as a machine-readable medium (e.g., memory 1660) for storing the computer-executable instructions (e.g., instructions to implement any other processes discussed herein). The machine-readable medium (e.g., memory 1660) may include, but is not limited to, flash memory, optical disks, CD-ROMs, DVD ROMs, RAMs, EPROMs, EEPROMs, magnetic or optical cards, phase change memory (PCM), or other types of machine-readable media suitable for storing electronic or computer-executable instructions. For example, embodiments of the disclosure may be downloaded as a computer program (e.g., BIOS) which may be transferred from a remote computer (e.g., a server) to a requesting computer (e.g., a client) by way of data signals via a communication link (e.g., a modem or network connection).

In some embodiments, computing device 1600 comprises connectivity 1670. Connectivity 1670 includes hardware devices (e.g., wireless and/or wired connectors and communication hardware) and software components (e.g., drivers, protocol stacks) to enable the computing device 1600 to communicate with external devices. The computing device 1600 could be separate devices, such as other computing devices, wireless access points or base stations, as well as peripherals such as headsets, printers, or other devices.

Connectivity 1670 can include multiple different types of connectivity. To generalize, the computing device 1600 is illustrated with cellular connectivity 1672 and wireless connectivity 1674. Cellular connectivity 1672 refers generally to cellular network connectivity provided by wireless carriers, such as provided via GSM (global system for mobile communications) or variations or derivatives, CDMA (code division multiple access) or variations or derivatives, TDM (time division multiplexing) or variations or derivatives, or other cellular service standards. Wireless connectivity (or wireless interface) 1674 refers to wireless connectivity that is not cellular, and can include personal area networks (such as Bluetooth, Near Field, etc.), local area networks (such as Wi-Fi), and/or wide area networks (such as WiMax), or other wireless communication.

In some embodiments, computing device 1600 comprises peripheral connections 1680. Peripheral connections 1680 include hardware interfaces and connectors, as well as software components (e.g., drivers, protocol stacks) to make peripheral connections. It will be understood that the computing device 1600 could both be a peripheral device (“to” 1682) to other computing devices, as well as have peripheral devices (“from” 1684) connected to it. The computing device 1600 commonly has a “docking” connector to connect to other computing devices for purposes such as managing (e.g., downloading and/or uploading, changing, synchronizing) content on computing device 1600. Additionally, a docking connector can allow computing device 1600 to connect to certain peripherals that allow the computing device 1600 to control content output, for example, to audiovisual or other systems.

In addition to a proprietary docking connector or other proprietary connection hardware, the computing device 1600 can make peripheral connections 1680 via common or standards-based connectors. Common types can include a Universal Serial Bus (USB) connector (which can include any of a number of different hardware interfaces), DisplayPort including MiniDisplayPort (MDP), High Definition Multimedia Interface (HDMI), Firewire, or other types.

Reference in the specification to “an embodiment,” “one embodiment,” “some embodiments,” or “other embodiments” means that a particular feature, structure, or characteristic described in connection with the embodiments is included in at least some embodiments, but not necessarily all embodiments. The various appearances of “an embodiment,” “one embodiment,” or “some embodiments” are not necessarily all referring to the same embodiments. If the specification states a component, feature, structure, or characteristic “may,” “might,” or “could” be included, that particular component, feature, structure, or characteristic is not required to be included. If the specification or claim refers to “a” or “an” element, that does not mean there is only one of the elements. If the specification or claims refer to “an additional” element, that does not preclude there being more than one of the additional element.

Furthermore, the particular features, structures, functions, or characteristics may be combined in any suitable manner in one or more embodiments. For example, a first embodiment may be combined with a second embodiment anywhere the particular features, structures, functions, or characteristics associated with the two embodiments are not mutually exclusive.

While the disclosure has been described in conjunction with specific embodiments thereof, many alternatives, modifications and variations of such embodiments will be apparent to those of ordinary skill in the art in light of the foregoing description. The embodiments of the disclosure are intended to embrace all such alternatives, modifications, and variations as to fall within the broad scope of the appended claims.

In addition, well known power/ground connections to integrated circuit (IC) chips and other components may or may not be shown within the presented figures, for simplicity of illustration and discussion, and so as not to obscure the disclosure. Further, arrangements may be shown in block diagram form in order to avoid obscuring the disclosure, and also in view of the fact that specifics with respect to implementation of such block diagram arrangements are highly dependent upon the platform within which the present disclosure is to be implemented (i.e., such specifics should be well within purview of one skilled in the art). Where specific details (e.g., circuits) are set forth in order to describe example embodiments of the disclosure, it should be apparent to one skilled in the art that the disclosure can be practiced without, or with variation of, these specific details. The description is thus to be regarded as illustrative instead of limiting.

An abstract is provided that will allow the reader to ascertain the nature and gist of the technical disclosure. The abstract is submitted with the understanding that it will not be used to limit the scope or meaning of the claims. The following claims are hereby incorporated into the detailed description, with each claim standing on its own as a separate embodiment. 

We claim:
 1. An apparatus comprising: a first transistor comprising a first fin comprising first source and drain regions, and a first channel region between the first source and drain regions; a second transistor comprising a second fin comprising second source and drain regions, and a second channel region between the second source and drain regions; a gate on the first and second channel regions, wherein the gate comprises an antiferroelectric gate dielectric and a gate electrode; a direct current contact, to receive a direct current, coupled to the gate electrode and further coupled to at least one of the first and second fins; and an alternating current contact, to receive an alternating current, coupled to at least one of the gate electrode, the first fin, or the second fin, wherein the first and second fins are not coupled to any other gate between the first source and drain regions.
 2. The apparatus of claim 1, wherein the gate electrode comprises one or more of Ti, N, or Al.
 3. The apparatus of claim 1, wherein the direct current contact is coupled to the first fin and the alternating current contact is coupled to the gate.
 4. The apparatus of claim 1, wherein the gate electrode is to mechanically resonate at a first frequency in response to the gate being actuated by the alternating current, from the alternating current contact, to generate periodic forces on the gate electrode, the apparatus comprising circuitry to sense the first frequency.
 5. The apparatus of claim 1, wherein: the direct current contact and the alternating current contact are each coupled to the first fin, the direct current contact is coupled to the first fin and the second fin, and the alternating current contact is coupled to the gate, or the direct current contact is coupled to the second fin and the alternating current contact is coupled to the first fin.
 6. The apparatus of claim 1, further comprising: alternating current and direct current sources that respectively couple to the alternating current contact and the direct current contact.
 7. The apparatus of claim 1, wherein the first transistor comprises a tri-gate transistor.
 8. An apparatus comprising: a first transistor comprising a first fin comprising a first channel region between a first source region and a first drain region; a second transistor comprising a second fin comprising a second channel region between a second source region and a second drain region; a gate on the first channel region and the second channel region, wherein the gate comprises an antiferroelectric gate dielectric and a gate electrode; a direct current contact, to receive a direct current, coupled to the gate electrode and at least one of the first and second fins; and an alternating current contact, to receive an alternating current, coupled to at least one of the gate electrode, the first fin, or the second fin.
 9. The apparatus of claim 8, wherein the gate electrode comprises one or more of Ti, N, or Al.
 10. The apparatus of claim 8, wherein the direct current contact is coupled to the first fin and the alternating current contact is coupled to the gate.
 11. The apparatus of claim 8, wherein the gate electrode is to mechanically resonate at a first frequency in response to the gate being actuated by the alternating current, from the alternating current contact, to generate periodic forces on the gate electrode, the apparatus comprising circuitry to sense the first frequency.
 12. The apparatus of claim 8, wherein: the direct current contact and the alternating current contact are each coupled to the first fin, the direct current contact is coupled to the first fin and the second fin, and the alternating current contact is coupled to the gate, or the direct current contact is coupled to the second fin and the alternating current contact is coupled to the first fin.
 13. The apparatus of claim 8, further comprising: alternating current and direct current sources that respectively couple to the alternating current contact and the direct current contact.
 14. The apparatus of claim 8, wherein the first transistor comprises a tri-gate transistor.
 15. A system, comprising: a memory; and a processor coupled to the memory, wherein the processor comprises a resonator comprising: a first transistor comprising a first fin comprising a first channel region between a first source region and a first drain region; a second transistor comprising a second fin comprising a second channel region between a second source region and a second drain region; a gate on the first channel region and the second channel region, wherein the gate comprises an antiferroelectric gate dielectric and a gate electrode; a direct current contact, to receive a direct current, coupled to the gate electrode and at least one of the first and second fins; and an alternating current contact, to receive an alternating current, coupled to at least one of the gate electrode, the first fin, or the second fin; and a communication interface to allow the processor to communicate with another device.
 16. The system of claim 15, wherein the gate electrode comprises one or more of Ti, N, or Al.
 17. The system of claim 15, wherein the direct current contact is coupled to the first fin and the alternating current contact is coupled to the gate.
 18. The system of claim 15, wherein the gate electrode is to mechanically resonate at a first frequency in response to the gate being actuated by the alternating current, from the alternating current contact, to generate periodic forces on the gate electrode, the system comprising circuitry to sense the first frequency.
 19. The system of claim 15, wherein: the direct current contact and the alternating current contact are each coupled to the first fin, the direct current contact is coupled to the first fin and the second fin, and the alternating current contact is coupled to the gate, or the direct current contact is coupled to the second fin and the alternating current contact is coupled to the first fin.
 20. The system of claim 15, further comprising: alternating current and direct current sources that respectively couple to the alternating current contact and the direct current contact. Docket No.: O1.AB2961-US-D1 33 